Micromachined Flow Sensors in Biomedical Applications
نویسندگان
چکیده
منابع مشابه
Micromachined Flow Sensors in Biomedical Applications
Application fields of micromachined devices are growing very rapidly due to the continuous improvement of three dimensional technologies of micro-fabrication. In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy, the ability to measure very sma...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2012
ISSN: 2072-666X
DOI: 10.3390/mi3020225